产品质保
从进料收货、制造流程、成品入库至出货检验,皆有完善之管制计划;并应用SPC方法落实执行质量控管,以达到出货零缺点的目标。
产品可靠度
Process | Table of Contents | Equipment Used |
Ingot | Oi / ORG / Cs Concentration | FTIR / GFA / SIMS |
Resistivity / RRG | 4PP / ADE | |
OISF / Slip Line / Swirl / EPD | Nomarski OM / Spot Light | |
Crystal and Flat Orientation | X - Ray Diffractometer | |
Wafering | Wafer flatness ( THK / TIR / STIR / TTV / BOW / WARP / FPD / SFPD ) | ADE |
Edge Profile | LEP810 | |
BSD Density | TMS | |
Poly / LTO Thickness | Filmmeter F50 | |
Laser Mark Depth | α - step | |
Surface / Bulk Metal Measurement | ICP - MS / SIMS | |
Particle / LPD (Size: 0.06~0.5um) | SP1 / CR / KLA - Tencor | |
Lifetime / Diffusion Length / Fe | SPV | |
Lifetime / Diffusion Length | µ - PCD | |
Surface Roughness | AFM | |
Shelf Life Test | SP1 / ICP - MS | |
Dimple | Magic Mirror | |
Epi | Resistivity | Hg - CV / 4PP / SRP |
Lifetime / Diffusion Length / Fe | SPV | |
Lifetime / Diffusion Length | µ - PCD | |
Surface / Bulk Metal Measurement | ICP - MS | |
Surface Defect / Slip | Slip finder |
失效分析
建立了制程/厂务/设备中的所有失效模式,以便能及早确认制程中所有的致命性与关键性失效发生的可能性,并同时进行矫正行动,如此可预防制程/厂务/设备所潜在的问题点,并使其发生机率降至最低。