成为半导体材料行业的卓越企业

To become an outstanding enterprise in semiconductor material industry

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产品质保

从进料收货、制造流程、成品入库至出货检验,皆有完善之管制计划;并应用SPC方法落实执行质量控管,以达到出货零缺点的目标。

产品可靠度

Process Table of Contents Equipment Used
Ingot Oi / ORG / Cs Concentration FTIR / GFA / SIMS
  Resistivity / RRG 4PP / ADE
  OISF / Slip Line / Swirl / EPD Nomarski OM / Spot Light
  Crystal and Flat Orientation X - Ray Diffractometer
Wafering Wafer flatness ( THK / TIR / STIR / TTV / BOW / WARP / FPD / SFPD ) ADE
  Edge Profile LEP810
  BSD Density TMS
  Poly / LTO Thickness Filmmeter F50
  Laser Mark Depth α - step
  Surface / Bulk Metal Measurement ICP - MS / SIMS
  Particle / LPD (Size: 0.06~0.5um) SP1 / CR / KLA - Tencor
  Lifetime / Diffusion Length / Fe SPV
  Lifetime / Diffusion Length µ - PCD
  Surface Roughness AFM
  Shelf Life Test SP1 / ICP - MS
  Dimple Magic Mirror
Epi Resistivity Hg - CV / 4PP / SRP
  Lifetime / Diffusion Length / Fe SPV
  Lifetime / Diffusion Length µ - PCD
  Surface / Bulk Metal Measurement ICP - MS
  Surface Defect / Slip Slip finder

失效分析

建立了制程/厂务/设备中的所有失效模式,以便能及早确认制程中所有的致命性与关键性失效发生的可能性,并同时进行矫正行动,如此可预防制程/厂务/设备所潜在的问题点,并使其发生机率降至最低。